Automated Dislocation Detection in Electron Channelling Contrast Imaging: A Comparative Study of Rule-Based, Neural Network, and Deep Learning Approaches

Quantifying threading dislocations in semiconductor materials via electron channelling contrast imaging (ECCI) is heavily bottlenecked by slow manual analysis.

Quantifying threading dislocations in semiconductor materials via electron channelling contrast imaging (ECCI) is heavily bottlenecked by slow manual analysis. This work benchmarks three automated detection pipelines on ECCI micrographs of gallium nitride (GaN) against a…