Substrate-metal interface engineering enhances TaN/Ta thin film superconducting resonator performance

Tantalum has been demonstrated as a promising material for superconducting qubits.

Tantalum has been demonstrated as a promising material for superconducting qubits. However, comparatively little attention has been given to its nitrides. Tantalum nitride exhibits a range of stoichiometries, resulting in a variety of material properties, including both…