PACE-SIMS: Checkpoint-Gated Autonomous SIMS Characterization with AI-Agent Quality Control

Time-of-flight secondary ion mass spectrometry (ToF-SIMS) is widely used for local chemical investigations across a broad range of materials and systems.

Time-of-flight secondary ion mass spectrometry (ToF-SIMS) is widely used for local chemical investigations across a broad range of materials and systems. However, its operation is expensive in expert time: a trained researcher must supervise acquisition throughout, dynamically…